To provide an inexpensive and easy-to-produce optical waveguide having a large difference in refractive index between a core and a clad and suitable for a small integrated circuit, and to provide a method for producing the optical waveguide.
The method for producing an optical waveguide includes the following steps (A) to (E): (A) disposing clad moldings patterned to form a space with a certain gap on the surface of a base each other; (B) forming a coating film on the upper side of the disposed clad moldings and on the base surface where no clad molding is disposed, by using a liquid containing an oxide precursor containing a titanium atom and a silicon atom; (C) irradiating the coating film with radiation through a photomask having a predetermined pattern, followed by heating to form a core irradiated with the radiation and having a higher refractive index; (D) dissolving and removing a non-radiation region or low-radiation region by development; and (E) removing the clad moldings from the base surface to form a structure of an all-air-clad optical waveguide.
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OSHIMA TOSHIRO
YOSHIMURA TETSUZO
Miyazaki Yoshio
Tsutomu Kato
Kyoko Oyama
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