To provide a method for producing an oxide superconductive thin film excellent in crystallinity, capable of forming a superconductive thin film laminated body including the above thin film and having high superconductive transition temperature, and including no toxic element during production process.
The production method includes a first process of forming a buffer thin film composed of YBa2Cu3Ox on a single crystal substrate, and a second process of continuously forming Ba-Ca-Cu-O-based oxide superconductive thin film on the buffer thin film. The first process includes a buffer thin film growth operation comprising epitaxial growth of the buffer thin film by a pulse laser deposition method. The second process includes: a superconductive thin film growth step comprising epitaxial growth of the oxide superconductive thin film on the buffer thin film by the pulse laser deposition method; a slow cooling step of slow cooling a substrate following the growth step; and a quick cooling step of quickly cooling the substrate following the slow cooling step.
JPH0848520A | 1996-02-20 | |||
JPH10502326A | 1998-03-03 | |||
JP2001505178A | 2001-04-17 | |||
JPH1143313A | 1999-02-16 | |||
JPH07309700A | 1995-11-28 | |||
JP2004362785A | 2004-12-24 | |||
JP2008140789A | 2008-06-19 | |||
JPH0848520A | 1996-02-20 | |||
JPH10502326A | 1998-03-03 | |||
JP2001505178A | 2001-04-17 | |||
JPH1143313A | 1999-02-16 | |||
JPH07309700A | 1995-11-28 | |||
JP2004362785A | 2004-12-24 | |||
JP2008140789A | 2008-06-19 |