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Title:
METHOD FOR PRODUCING OXIDE SUPERCONDUCTIVE THIN FILM
Document Type and Number:
Japanese Patent JP2010215467
Kind Code:
A
Abstract:

To provide a method for producing an oxide superconductive thin film excellent in crystallinity, capable of forming a superconductive thin film laminated body including the above thin film and having high superconductive transition temperature, and including no toxic element during production process.

The production method includes a first process of forming a buffer thin film composed of YBa2Cu3Ox on a single crystal substrate, and a second process of continuously forming Ba-Ca-Cu-O-based oxide superconductive thin film on the buffer thin film. The first process includes a buffer thin film growth operation comprising epitaxial growth of the buffer thin film by a pulse laser deposition method. The second process includes: a superconductive thin film growth step comprising epitaxial growth of the oxide superconductive thin film on the buffer thin film by the pulse laser deposition method; a slow cooling step of slow cooling a substrate following the growth step; and a quick cooling step of quickly cooling the substrate following the slow cooling step.


Inventors:
KIBA SHINICHIRO
Application Number:
JP2009065969A
Publication Date:
September 30, 2010
Filing Date:
March 18, 2009
Export Citation:
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Assignee:
INST NAT COLLEGES TECH JAPAN
International Classes:
C30B29/22; C23C14/08; C23C14/28; H01L39/24
Domestic Patent References:
JPH0848520A1996-02-20
JPH10502326A1998-03-03
JP2001505178A2001-04-17
JPH1143313A1999-02-16
JPH07309700A1995-11-28
JP2004362785A2004-12-24
JP2008140789A2008-06-19
JPH0848520A1996-02-20
JPH10502326A1998-03-03
JP2001505178A2001-04-17
JPH1143313A1999-02-16
JPH07309700A1995-11-28
JP2004362785A2004-12-24
JP2008140789A2008-06-19
Attorney, Agent or Firm:
Junichi Yoshinaga