Title:
レジスト用重合体の製造方法
Document Type and Number:
Japanese Patent JP4049762
Kind Code:
B2
Inventors:
Kaneko Isao
Hideyuki Inaba
Hideaki Kuwano
Yukiya Wakisaka
Hideyuki Inaba
Hideaki Kuwano
Yukiya Wakisaka
Application Number:
JP2004139853A
Publication Date:
February 20, 2008
Filing Date:
May 10, 2004
Export Citation:
Assignee:
Mitsubishi Rayon Co., Ltd.
International Classes:
C08F6/12; G03F7/039
Domestic Patent References:
| JP2001098025A | ||||
| JP2003082933A | ||||
| JP2002145955A |
Attorney, Agent or Firm:
Akio Miyazaki
Katsuhiro Ito
Ishibashi Masayuki
Katsuhiro Ito
Ishibashi Masayuki