Title:
押圧装置および相転移型双晶を有する水晶の製造方法
Document Type and Number:
Japanese Patent JP4209162
Kind Code:
B2
Abstract:
The upper block 12 contacts the bearing block 20, and the bearing block 20 is coupled to the upper plate 21. The upper block 12 has a protruding part 22 on the upper surface that is worked into a convex surface with a radius of R1, and the bearing block 20 has a recessed part 23 in the undersurface that is worked into a concave surface with a radius of R2 (R2 > R1). As a result of such a construction being used, the pressing surface of the upper pressing plate 15 always conforms to the surface of the quartz crystal substrate 11 during pressing, so that a uniform load is applied to the quartz crystal substrate 11. As a result, the surface of the quartz crystal can be uniformly pressed in the hot pressing method.
Inventors:
Masaki Harada
Nao Kurimura
Nao Kurimura
Application Number:
JP2002276001A
Publication Date:
January 14, 2009
Filing Date:
September 20, 2002
Export Citation:
Assignee:
NIKON CORPORATION
National Institute for Materials Science
National Institute for Materials Science
International Classes:
C30B29/18; B30B15/06; C30B33/00
Domestic Patent References:
| JP2000277826A | ||||
| JP9083281A | ||||
| JP2001110788A | ||||
| JP2002122898A |
Attorney, Agent or Firm:
Patent business corporation Okada Fusimi Hirano
Toshiaki Hosoe
Toshiaki Hosoe