Title:
半導体素子のテストハンドラの素子搬送装置の作業位置認識方法
Document Type and Number:
Japanese Patent JP4141820
Kind Code:
B2
Abstract:
An apparatus and method is provided for recognizing a working position of a device transfer system in a semiconductor device test handler. The working position of a transfer unit of the handler is adjusted based on tray and change kit positions to allow components to be quickly and precisely loaded and transferred when various kinds of semiconductor devices are tested in the handler. A laser sensor which detects a color change of an object is provided with the transfer unit, and scans corners of the tray and change kits to acquire position information related to the tray and change kits. The working position of the transfer unit is calculated using basic handler information contained in the control unit of the handler and the acquired information.
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Inventors:
Hyun, Z, Fan
Gold
Gold
Application Number:
JP2002358351A
Publication Date:
August 27, 2008
Filing Date:
December 10, 2002
Export Citation:
Assignee:
Mille Co., Ltd.
International Classes:
G01R31/26; H01L21/00; H01L21/677; H01L21/68; G01R1/073
Domestic Patent References:
| JP10148507A | ||||
| JP54114959U | ||||
| JP4013907A |
Attorney, Agent or Firm:
Kenji Yoshitake
Hidetoshi Tachibana
Yasukazu Sato
Hiroshi Yoshimoto
Yasushi Kawasaki
Hidetoshi Tachibana
Yasukazu Sato
Hiroshi Yoshimoto
Yasushi Kawasaki