PURPOSE: To reproduce in high fidelity and resoltion, by providing a positive type resist layer on an etching layer of a mask formed by selectively removing a laser-sensitive layer and, after uniformly exposing through the mask, developing the resist layer to an uneven part.
CONSTITUTION: An etching layer 21 and laser-sensitive layer 22 are successively formed on a base body 20 and a laser beam is irradiated upon them so as to remove laser- irradiated parts 24. Then parts 26 corresponding to beam irradiated parts 25 are removed by etching with unirradiated parts 23 being used as a mask and pits are formed. After the pits are formed, the unirradiated parts 23 are removed and a mask for phonograph disk and recording disk is obtained. By applying a positive type resist layer 28 on the entire surface of the mask thus formed and developing the resist layer 28 after the resist layer is uniformly exposed from the back through the mask, projector parts 29 are obtained. Then a metallic thin film 31 is provided and a metallic layer 32 is formed on the metallic thin film 31 by electroplating. After the electroplating, the metallic thin film 31 and metallic layer 32 are peeled off from the base body 20. Thus a master stamper 36 is obtained. Therefore, faithful reproduction which is high in resolution can be performed.
| JP2004087015 | COVER SHEET PACKAGE |
| JP2001028150 | METHOD AND DEVICE FOR REMOVING ECCENTRICITY |
| JP2723986 | PROBLEM TO BE SOLVED: To manufacture an optical disc master. |
SATOU CHIKATOSHI
SUZUKI KIYOAKI
