To provide a method for searching the leaking part of a pipe, such that leakage from a pipe placed in a vacuum chamber can be searched in a short time and its leaking part can be specified during the operation of a vacuum device, and the vacuum device that can perform the method using simple constitution.
A pipe 24, which is placed inside a vacuum chamber 21 provided with a leak detector 31, and which has a supply part 24a and a discharge part 24b outside the vacuum chamber 21, is provided at its supply part 24a with a flowmeter 29 and a pump 40 the intake side of which is connected to a gas supply pipe 38 supplying helium gas and to a water supply pipe 26. To search a leaking part, the pump 40 is operated to mix the helium gas into water that should flow in the pipe 24, and the mixed water is supplied to the pipe 24 to detect the helium concentration (or partial pressure) of the vacuum chamber 21 by means of the leak detector 31.
HIROKI SEIJI
YAGISHITA KOJI
OCHIAI EIJIRO
ULVAC CORP