METHOD FOR SUPPLYING OZONIZED WATER OF CONSTANT CONCENTRATION

Title:

METHOD FOR SUPPLYING OZONIZED WATER OF CONSTANT CONCENTRATION

Document Type and Number:

Japanese Patent JP2005161284

Kind Code:

A

Abstract:

To provide equipment which keeps the ozone concentration of ozonized water and is not affected by the fluctuation of the usage of ozonized water.

This method for supplying the ozonized water of constant concentration comprises the steps of: using an ozonized water producing facility and a system for using the ozonized water at a distant place; arranging an ozonized water circulating line between the ozonized water producing facility and the ozonized water using place; circulating the ozonized water through the ozonized water circulating line so that the flow rate of the ozonized water at an outlet of the ozonized water producing facility always becomes constant; detecting the ozone concentration of the ozonized water near the outlet; adjusting the amount of the gaseous ozone to be supplied to the ozonized water producing facility and/or the gaseous ozone concentration on the basis of the detected ozone concentration; detecting the usage of the ozonized water on an ozonized water returning line and; controlling the amount of the ozonized water to be produced on the basis of the detected usage. As a result, even when the use of the ozonized water is stopped temporarily at the ozonized water using place, the ozonized water can be used without being discarded, the ozonized water of constant concentration can be produced/supplied and ozone can be used effectively.

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Inventors:

ADACHI TAKIO
SHIMOI YOICHI
SHINBARA TERUO
KAMIMURA KENICHI

Application Number:

JP2003436042A

Publication Date:

June 23, 2005

Filing Date:

November 28, 2003

Export Citation:

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Assignee:

NITTETSU KAKOKI KK
SILTRONIC JAPAN CORP

International Classes:

B08B7/00; C01B13/10; C02F1/00; C02F1/78; G05D7/00; G05D11/08; H01L21/304; (IPC1-7): B08B7/00; C02F1/78; H01L21/304

Domestic Patent References:

JP2000271549A	2000-10-03
JP2003142449A	2003-05-16
JP2002096030A	2002-04-02

Attorney, Agent or Firm:

Akira Ito

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