Title:
METHOD FOR SUPPRESSING ADHERENCE OF MICROPARTICLE TO ARTICLE SURFACE
Document Type and Number:
Japanese Patent JP2002085033
Kind Code:
A
Abstract:
To provide a method for reducing the adherence of microparticles to the surface of articles placed in an atmosphere where the microparticles are suspended.
This method comprises the following practice: the velocities v and v2 of an airflow and/or the moving velocities v1 and v3 of respective articles 12 and 14 are regulated so that the relative airflow velocity on the respective surfaces of the articles 10, 12 and 14 placed in an atmosphere where microparticles are suspended comes to 1.5-2.5 m/s.
Inventors:
ONAKA TAKAMASA
Application Number:
JP2000277181A
Publication Date:
March 26, 2002
Filing Date:
September 12, 2000
Export Citation:
Assignee:
HITACHI PLANT ENG & CONSTR CO
International Classes:
F24F7/06; A23L3/3418; H01L21/02; (IPC1-7): A23L3/3418; F24F7/06; H01L21/02