Title:
METHOD FOR SURFACE-TREATING DIAMOND
Document Type and Number:
Japanese Patent JPH0648893
Kind Code:
A
Abstract:
PURPOSE: To provide a method for surface-treating the surface of a diamond hardly converting to graphite to form a highly clean surface thereof.
CONSTITUTION: A diamond thin film 1 on an Si substrate with the surface covered with an amorphous carbon component formed by microwave CVD is set on a holder 3 in a vacuum vessel 2 kept at ≤10-5Torr by a pump 4, and a UV 7 of 308nm wavelength from an excimer laser 6 is condensed by a lens 8 and passed through a UV-transmissive window 5 to irradiate the thin film 1 at about 400mJ/shot, with the cycle of about 10 shot/sec, at about 100 shots (10sec) and with the irradiation density of 1J/cm2.
Inventors:
KITAHATA MAKOTO
DEGUCHI MASAHIRO
HIRAO TAKASHI
DEGUCHI MASAHIRO
HIRAO TAKASHI
Application Number:
JP20283992A
Publication Date:
February 22, 1994
Filing Date:
July 30, 1992
Export Citation:
Assignee:
MATSUSHITA ELECTRIC IND CO LTD
International Classes:
B08B7/00; C30B29/04; (IPC1-7): C30B29/04; B08B7/00
Attorney, Agent or Firm:
Hiroyuki Ikeuchi (1 person outside)
Next Patent: RUTILE SINGLE CRYSTAL