Title:
METHOD FOR SYNTHESIZING COPPER PRECURSOR
Document Type and Number:
Japanese Patent JP2002363186
Kind Code:
A
Abstract:
To provide a method for synthesizing a relatively pure copper precursor.
This method for synthesizing a copper precursor is a process for mixing copper monoxide (Cu2O) with 1,1,1,5,5,5-hexafluoroacetylacetone [H(hfac)] and a ligand and includes a process in which the aforesaid copper monoxide is added at least 1.5 times of chemical equivalent of the [H(hfac)] to be added. It is possible to synthesize a relatively pure (hfac)Cu(I)L precursor which is used as it is for accumulating thin CDV copper films without further purification.
Inventors:
ZHUANG WEI WEI
EVANS DAVID RUSSELL
SHIEN TEN SUU
EVANS DAVID RUSSELL
SHIEN TEN SUU
Application Number:
JP2002079637A
Publication Date:
December 18, 2002
Filing Date:
March 20, 2002
Export Citation:
Assignee:
SHARP KK
International Classes:
C07C11/10; C07C11/107; C07C15/44; C07C45/77; C07C49/92; C07F1/08; C07F7/08; C23C16/18; C23C16/44; H01L21/283; H01L21/285; (IPC1-7): C07F1/08; C07C11/10; C07C11/107; C07C15/44; C07C45/77; C07C49/92; C07F7/08; C23C16/18; H01L21/283; H01L21/285
Attorney, Agent or Firm:
Shusaku Yamamoto