Title:
ポリフェノール化合物の合成方法及びポリフェノール化合物を含むポジ型フォトレジスト組成物
Document Type and Number:
Japanese Patent JP4117037
Kind Code:
B2
Inventors:
Kunihiko Kodama
Atsushi Momota
Atsushi Momota
Application Number:
JP14034296A
Publication Date:
July 09, 2008
Filing Date:
June 03, 1996
Export Citation:
Assignee:
FUJIFILM Corporation
International Classes:
C07C37/16; G03F7/022; C07B41/02; C07C39/15; C07C39/17; C07C39/21; C07C43/23; C07C43/295; C07C67/18; C07C69/157; C07C235/56; C07C237/40; C07C309/73; C07C311/29; C07C311/44; C07C317/22; C07C317/36; C07C323/20; C07C323/37; C07C325/02; G03F7/023
Domestic Patent References:
| JP6167805A | ||||
| JP2282342A | ||||
| JP8099952A | ||||
| JP5255164A | ||||
| JP64066135A | ||||
| JP52089631A | ||||
| JP55004382A | ||||
| JP3145648A |
Foreign References:
| US2839586 | ||||
| GB1202762B | ||||
| US4609767 | ||||
| US5178986 |
Other References:
NIKIFOROV,G.A. et al.,Chemical Abstracts,1990年,Vol.113,p.596, the abstract No.23237y
NIKIFOROV,G.A. et al.,Izvestiya Akademii Naus SSSR, Seriya Khimicheskaya,1989年,No.12 ,p.2765-2770
NIKIFOROV,G.A. et al.,Izvestiya Akademii Naus SSSR, Seriya Khimicheskaya,1989年,No.12 ,p.2765-2770
Attorney, Agent or Firm:
Takeshi Takamatsu
Kiyozumi Yazawa
Kiyozumi Yazawa