Title:
METHOD AND SYSTEM FOR HEAT TREATING WORK
Document Type and Number:
Japanese Patent JP2003045866
Kind Code:
A
Abstract:
To provide a heat treating method and a small heat treatment system of a work in which increase in the number of samples is suppressed, hour by productivity is high in an analytic system, contamination on sample is suppressed and uniformity in treatment is high.
In the method and system for heat treating a plurality of sheets of disc-like work having different diameters or splitted works mixedly in a horizontal heat treatment furnace, the works are mounted on a boat with an interval in the direction substantially perpendicular to the longitudinal axis of the furnace while shifting the center lines thereof in the vertical direction.
Inventors:
FUKUYAMA MITSUHIRO
SEKI HIDETOSHI
SEKI HIDETOSHI
Application Number:
JP2001229811A
Publication Date:
February 14, 2003
Filing Date:
July 30, 2001
Export Citation:
Assignee:
SHINETSU HANDOTAI KK
International Classes:
C21D1/00; F27D5/00; H01L21/22; H01L21/31; H01L21/324; H01L21/68; H01L21/683; (IPC1-7): H01L21/31; C21D1/00; F27D5/00; H01L21/22; H01L21/324; H01L21/68
Attorney, Agent or Firm:
Masahisa Takahashi (1 person outside)