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Patent Searching and Data


Title:
METHOD AND SYSTEM FOR MANUFACTURE OF SEMICONDUCTOR DEVICE
Document Type and Number:
Japanese Patent JPH05226208
Kind Code:
A
Abstract:

PURPOSE: To enhance the operating efficiency of a manufacturing apparatus which manufactures a semiconductor device and to shorten the process period of a product.

CONSTITUTION: A product A is stocked in an intermediate stock process 6 after it has finished the treatment of a first-half process group 4 which is composed of a process A, a process B and a process C. Simultaneously with the stock, a report on the stock is sent to a computer 13 from a terminal 7; the computer 13 stores the report in a history information file 11. The product A in the intermediate stock process 6 is divided according to a difference in a latter-half process group 5 and fed to the latter-half process group. Simultaneously with the feed to the latter-half process group, a report on the stock is sent to the computer 13 from a terminal 8; it is stored in the history information file 11. At this time, the computer 13 gives the product name of the product in the latter-half process group 5 on the basis of a corresponding file 12 and the product name of the product A.


Inventors:
IGARASHI SHINJI
Application Number:
JP2982392A
Publication Date:
September 03, 1993
Filing Date:
February 18, 1992
Export Citation:
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Assignee:
NEC YAMAGATA LTD
International Classes:
H01L21/02; (IPC1-7): H01L21/02
Attorney, Agent or Firm:
Naoki Kyomoto (2 outside)