Title:
METHOD FOR TREATING EXHAUST GAS AND SYSTEM FOR TREATING EXHAUST GAS
Document Type and Number:
Japanese Patent JP2006055806
Kind Code:
A
Abstract:
To detoxify a chlorine gas at a low running cost by reducing an amount of a reducing agent used.
A method for treating an exhaust gas is for detoxifying a first exhaust gas by bringing the first exhaust gas containing the chlorine gas from a dry etching device 10a into contact with a cleaning liquid loaded with an alkaline agent and the reducing agent in a device for treating the exhaust gas 20, and bringing a second gas containing a sulfur dioxide gas from a dry etching device 10b into contact with the cleaning liquid in the device for treating the exhaust gas 20.
Inventors:
TAKEMOTO SUSUMU
NIINO ATSUSHI
NIINO ATSUSHI
Application Number:
JP2004242584A
Publication Date:
March 02, 2006
Filing Date:
August 23, 2004
Export Citation:
Assignee:
SHARP KK
International Classes:
B01D53/68; B01D53/34; B01D53/50; B01D53/77; H01L21/3065
Attorney, Agent or Firm:
Hiroshi Maeda
Yuji Takeuchi
Yoneda Keikei
Yuji Takeuchi
Yoneda Keikei