PURPOSE: To form a good-quality vapor-deposited film irrespective of the kind of the vapor deposition substance and the diameter of a tubular member by impressing a voltage between the raw material to be vaporized and the tubular member, and irradiating the raw material to be vaporized by laser light.

CONSTITUTION: The optical path of laser light 3 after passing through an optical path 28 is bent by an optical path changing optical component 26, and the laser light is introduced into a vacuum chamber 2 through a laser light path 18 and a laser light condensing optical component 17. A negative voltage 21 is impressed on the tubular member 13, all the other parts are ground, a vent 27 is provided to a base part 14 to evacuate the inside of the vacuum chamber 2 and the tubular member 13, and a gaseous reactant 24 is introduced from a gas inlet 25. The raw material 15 to be vaporized, the laser light path changing optical component 26, and the condensing optical component 17 are water- cooled, the tubular member 13 is heated by a heater 20 to keep the temp. during vapor deposition constant to improve the characteristic of a vapor-deposited film 23, and the homogeneous vapor-deposited film 23 is obtained.