Title:
イオン注入に使用するためのイオンをイオン源から抽出するための方法および装置
Document Type and Number:
Japanese Patent JP2009540534
Kind Code:
A
Abstract:
Thermal control is provided for an extraction electrode of an ion-beam producing system that prevents formation of deposits and unstable operation and enables use with ions produced from condensable vapors and with ion sources capable of cold and hot operation. Electrical heating of the extraction electrode is employed for extracting decaborane or octadecaborane ions. Active cooling during use with a hot ion source prevents electrode destruction, permitting the extraction electrode to be of heat-conductive and fluorine-resistant aluminum composition.
More Like This:
| JP2656259 | [Title of Invention] Ion Generator |
| JPH01149345 | LIQUID METAL ION SOURCE |
Inventors:
Horse Key, Thomas N
Robert W, Millgate
Sacco, George Pea
Crawl, wade allen
Robert W, Millgate
Sacco, George Pea
Crawl, wade allen
Application Number:
JP2009515597A
Publication Date:
November 19, 2009
Filing Date:
June 12, 2007
Export Citation:
Assignee:
Semiquip Incorporated
International Classes:
H01J27/02; H01J7/24; H01J37/08; H01J37/317; H01J
Domestic Patent References:
| JPH02162638A | 1990-06-22 | |||
| JPH06119896A | 1994-04-28 |
Foreign References:
| WO2005059942A2 | 2005-06-30 |
Attorney, Agent or Firm:
Shinjiro Ono
Kazuo Shamoto
Yasushi Kobayashi
Akio Chiba
Hiroyuki Tomita
Yukio Kanegae
Kazuo Shamoto
Yasushi Kobayashi
Akio Chiba
Hiroyuki Tomita
Yukio Kanegae