Title:
マスフローコントローラにおける圧力補償のための方法および装置
Document Type and Number:
Japanese Patent JP4528617
Kind Code:
B2
Abstract:
Performance of mass flow controller may be vulnerable to pressure transients in a flow path to which the controller is coupled for the purpose of controlling the fluid flow. A system and method are provided for reducing or eliminate performance degradations, instabilities, and/or inaccuracies of a mass flow controller caused by changes in the pressure environment. In particular, a method and system are provided for compensating for pressure transients in the pressure environment of a flow path and mass flow controller.
Inventors:
Lulu, John Michael
Wang, Chun
Saggio, Joseph A., Junior
Wang, Chun
Saggio, Joseph A., Junior
Application Number:
JP2004523546A
Publication Date:
August 18, 2010
Filing Date:
July 17, 2003
Export Citation:
Assignee:
CELERITY, INC.
International Classes:
G05D7/06; G05B13/04
Domestic Patent References:
| JP6502942A | ||||
| JP3137419A |
Foreign References:
| WO2001004716A1 |
Attorney, Agent or Firm:
Kuro Fukami
Toshio Morita
Yoshihei Nakamura
Yutaka Horii
Hisato Noda
Masayuki Sakai
Toshio Morita
Yoshihei Nakamura
Yutaka Horii
Hisato Noda
Masayuki Sakai