Title:
荷電粒子ビーム照射デバイス及び荷電粒子ビーム照射デバイスを動作させるための方法
Document Type and Number:
Japanese Patent JP5331516
Kind Code:
B2
Abstract:
A method for operating a charged particle beam emitting device and, in particular, an electron beam emitting device including a cold field emitter having an emitter surface is provided. The method includes the steps of: (a) placing the cold field emitter in a vacuum of a given pressure, the cold field emitter exhibiting a high initial emission current I 0 and a lower stable mean emission current I S under a given electric extraction field; (b) applying the given electric extraction field to the cold field emitter for emitting electrons from the emitter surface; (c) performing a cleaning process by applying at least one heating pulse to the cold field emitter for heating the emitter surface to a temperature T C , whereby the cleaning process is performed before the emission current of the cold field emitter is declined to the lower stable mean emission value I S ; and (d) repeating the cleaning process (c) to keep the emission current of the cold field emitter continuously above the substantially stable emission value Is.
Inventors:
Fan elephant
Pavel Adamek
Jürgen Frosin
Jimmy Vishnipolsky
Pavel Adamek
Jürgen Frosin
Jimmy Vishnipolsky
Application Number:
JP2009048243A
Publication Date:
October 30, 2013
Filing Date:
March 02, 2009
Export Citation:
Assignee:
ICT Integrated Circuit Testing Gesell Shaft Feer Hull Priter Brief Tehnik M B Her
International Classes:
H01J37/06; H01J1/304; H01J27/26; H01J37/073
Domestic Patent References:
| JP53023663B1 | ||||
| JP55104059A | ||||
| JP52046756A | ||||
| JP2002208368A |
Attorney, Agent or Firm:
Sadao Kumakura
Fumiaki Otsuka
Disciple Maru Ken
Ino Sato
Fumiaki Otsuka
Disciple Maru Ken
Ino Sato