Title:
少なくとも2つの光学要素の結像特性を最適化する方法およびリソグラフィー製造方法
Document Type and Number:
Japanese Patent JP2005513794
Kind Code:
A
Abstract:
A method for improving imaging properties of two or more optical elements comprises the step of determining for at least one of the two optical elements a polarisation-dependent perturbation. In a further step a polarisation-independent perturbation is determined for at least one of the two optical elements. Then a target position for the at least one movable optical element is calculated such that, in the target position, the total perturbation of the at least two optical elements which is made up of the polarisation-dependent perturbations and polarisation-independent perturbations of the two optical elements, is minimized. Finally the at least one movable optical element is moved the to the calculated target position.
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Inventors:
Micking, Burgit
Grenelle, Truff
Cole, alexander
Grenelle, Truff
Cole, alexander
Application Number:
JP2003555281A
Publication Date:
May 12, 2005
Filing Date:
October 02, 2002
Export Citation:
Assignee:
Carl Zeiss SMT AG
International Classes:
G02B5/30; G03F7/20; H01L21/027; G02B7/00; (IPC1-7): H01L21/027; G02B7/00; G03F7/20
Attorney, Agent or Firm:
Masaki Yamakawa