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Title:
インプリント・リソグラフィ・プロセス中にテンプレートを移動させるための方法、システム、ホルダ、アセンブリ
Document Type and Number:
Japanese Patent JP4937750
Kind Code:
B2
Abstract:
Disclosed are a method system holder (40a) and template for transferring template (26). A motion stage having a template transfer holder is provided. The transfer holder is adapted to have a patterned mold facing the motion stage.

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Inventors:
Mario Jay, Meissle
Choi, Byung-jin
Babs, Daniel A
Bailey, Hillman El
Application Number:
JP2006532954A
Publication Date:
May 23, 2012
Filing Date:
May 11, 2004
Export Citation:
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Assignee:
Molecular Imprints Incorporated
International Classes:
H01L21/027; B41F11/00; B41L39/00; B81C99/00; G03F7/20; B29C
Domestic Patent References:
JPH05138683A1993-06-08
JPH06166060A1994-06-14
JPH05261768A1993-10-12
JPS63131144A1988-06-03
JPS63269519A1988-11-07
JPH09328188A1997-12-22
JP2006506814A2006-02-23
JP2004327994A2004-11-18
JP2002093748A2002-03-29
JP2004523906A2004-08-05
JP2005508075A2005-03-24
JPS6012550A1985-01-22
Foreign References:
WO2002079876A22002-10-10
WO2002067055A22002-08-29
Attorney, Agent or Firm:
Masaki Yamakawa
Shigeki Yamakawa



 
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