PURPOSE: To improve the reliability of an actuator and its manufacturing yield by reducing the unevenness of the stokes of the swelling evacuating vibration of a diaphragm.
CONSTITUTION: A diaphragm base body 20 having a diaphragm 21 and an operation fluid space 22 opened at its back is immersed in an operation liquid whose temperature is maintained at a temperature higher than an operation fluid space temperature at the time of the diaphragm 21 being at the lower dead center substantially at the time of micro actuator use, and a support slab 30 on whose surface UV rays curing bonding agent layer is formed, is mounted on the diaphragm base body 20 in the operation liquid, and by irradiating the UV rays, the support slab 30 is fixed at the base body 20.
| JP2003336573 | NOVEL HEAT CYCLE AND COMPOSITE POWER GENERATION SYSTEM AND DEVICE THEREOF |
| WO/2022/136886 | ACTUATOR |
| JP5636820 | Actuators and electronic devices |
IRISA KOICHI
ANDO MITSUHIRO
IWATA YUJI
NARUSE YOSHIHIRO
Next Patent: MICRO ACTUATOR