Title:
MICRO-BULB
Document Type and Number:
Japanese Patent JPH06341556
Kind Code:
A
Abstract:
PURPOSE: To provide a micro-bulb which has a high sealing property when a lead-in port and a lead-out port are cut off.
CONSTITUTION: This micro-bulb is composed of a glass 2 in which a lead-in port 5 and a lead-out port 6 are formed, an Si substrate 1 which has a movable part 1a, and a glass 3 which has an electrode 4, and an impurity is ion-implanted to the movable 1a to form a high hardness part 7. Since the hardness difference between the high hardness part 7 and the glass 2 is large, the adhesion degree when the movable part 1a makes contact with the glass 2 is increased.
Inventors:
NAKANISHI HIROAKI
Application Number:
JP12940893A
Publication Date:
December 13, 1994
Filing Date:
May 31, 1993
Export Citation:
Assignee:
SHIMADZU CORP
International Classes:
F16K1/36; B81B3/00; F16K31/02; (IPC1-7): F16K1/36
Attorney, Agent or Firm:
Yoshiaki Nishioka