Title:
MICRO-DIMENSION MEASURING METHOD
Document Type and Number:
Japanese Patent JP3146255
Kind Code:
B2
Abstract:
PURPOSE: To realize highly accurate measurement by sensing an object to be measured with an optical microscope and image sensor and calculating the positions of a graph in which the brightness level of a video signal corresponding to respective point positions of the object is shown as a wave crest or wave trough.
CONSTITUTION: Point a indicates a middle brightness (LTs) level between a brightness level (VLp) at the position just before shape change starting on a graph showing a wave crest or wave trough and a brightness level at the top of the wave crest or the bottom of the wave trough. Point b indicates a middle brightness level (RTs) between the bright level at the top or bottom of the wave crest and a brightness level (VRp) at the position just after ending of shape change. When it is assumed that a point c=a+(α/2) and a point d=a-(α/2) (α is the resolution of an optical microscope), the dimension (X) of the object can be calculated by using a formula, X= Formula I+ Formula II+ Formula III (where, Vi is i-th brightness level and K is a coefficient).
Inventors:
Shogo Kosuge
Application Number:
JP18703493A
Publication Date:
March 12, 2001
Filing Date:
June 30, 1993
Export Citation:
Assignee:
Hitachi Kokusai Electric Co., Ltd.
International Classes:
G01B11/00; G01B11/02; G06T7/60; (IPC1-7): G01B11/02