Title:
Micro electromechanical system
Document Type and Number:
Japanese Patent JP6294584
Kind Code:
B2
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Inventors:
Alessandro Rossi
Adolfo Giambastani
Lorenzo Bertini
Adolfo Giambastani
Lorenzo Bertini
Application Number:
JP2012281224A
Publication Date:
March 14, 2018
Filing Date:
December 25, 2012
Export Citation:
Assignee:
Maxim Integrated Products Incorporated
International Classes:
G01P15/125; B81B3/00; G01C19/5783; H01L29/84
Domestic Patent References:
| JP2011507455A | ||||
| JP2007210083A | ||||
| JP2007144611A | ||||
| JP201147677A |
Foreign References:
| US20100024549 |
Attorney, Agent or Firm:
Takashi Tsuno
Mitsuharu Oda
Kato coming
Mitsuharu Oda
Kato coming
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