Title:
MICRO ELECTROMECHANICAL SYSTEMS THERMAL SWITCH
Document Type and Number:
Japanese Patent JP2010192443
Kind Code:
A
Abstract:
To provide a micro Electro-mechanical systems (MEMS) thermal switch.
The switch includes a FET having a source and drain in a substrate and a beam isolated from the substrate. The beam is positioned over the source and the drain and spaced by a predefined gap. When the thermal set point is reached, the beam moves to electrically connect the source to the drain.
Inventors:
KANG JOON-WON
Application Number:
JP2010030160A
Publication Date:
September 02, 2010
Filing Date:
February 15, 2010
Export Citation:
Assignee:
HONEYWELL INT INC
International Classes:
H01H37/52; B81B3/00; B81C1/00; H01H1/00; H01H11/00; H01H59/00; H01H61/00
Domestic Patent References:
| JPS5253277A | 1977-04-28 | |||
| JP2000031397A | 2000-01-28 | |||
| JPH11297931A | 1999-10-29 |
Foreign References:
| US5463233A | 1995-10-31 | |||
| US20030034870A1 | 2003-02-20 |
Attorney, Agent or Firm:
Shinjiro Ono
Kazuo Shamoto
Yasushi Kobayashi
Akio Chiba
Hiroyuki Tomita
Naoki Kazuma
Kazuo Shamoto
Yasushi Kobayashi
Akio Chiba
Hiroyuki Tomita
Naoki Kazuma
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