To provide a micro-fabricated device equipped with a thermally isolating structure for increasing or reducing thermal conductivity between an element substrate and a supporting structure facing the outside.
The micro-fabricated devices (100, 300, 400, 500) are equipped with the supporting structures (140, 240, 340, 440, 540) wherein apertures are formed, the device substrates (130, 230, 330, 430, 530) which are arranged in the apertures, and further, the thermally isolating structures (120, 220, 320, 420, 520) which perform thermal coupling of the device substrates and the supporting structures. The thermally isolating structure includes at least one n-type dope region (152, 252, 352, 452, 452') and at least one p-type dope region (154, 254, 354, 454, 454') in the structures or on the structures, and these dope regions are arranged being isolated from each other. The structure further includes an electric wiring for forming an integrated type thermoelement by connecting at least one n-type dope region and at least one p-type dope region.
| JP3676010 | POWER GENERATING DEVICE |
| JPH0889545 | THERMAL POWER GENERATOR FOR BATHTUB AND AIR BUBBLE BATHTUB SYSTEM |
| WO/2018/216345 | THERMOELECTRIC GENERATOR TRANSMITTER |
LIEBESKIND JOHN
CHEN CHIEN-HUA
| JP2000311974A | 2000-11-07 | |||
| JPH11233837A | 1999-08-27 | |||
| JP2000340848A | 2000-12-08 | |||
| JPH03236288A | 1991-10-22 |
Takahiko Mizobe
Kiyoharu Nishiyama