MICRO-GUIDE MECHANISM, MICRO-ACTUATOR AND MICRO-SENSOR

Title:

MICRO-GUIDE MECHANISM, MICRO-ACTUATOR AND MICRO-SENSOR

Document Type and Number:

Japanese Patent JP2001205599

Kind Code:

A

Abstract:

To provide a micro-guide structure requiring a shorter plating time and less aftertreatment by reducing a difference in electric plating speed and keeping the height of the finally completed structure in order.

A micro-guide mechanism comprises a substrate, a fixed member fixed to the substrate, and a micro-spring member having a rectangular flat member with a portion swollen in the cross direction to form a columnar portion, the micro-spring member having a micro-cantilever fixed at one end to the fixed member and a mover, the mover being connected to the free end of the micro-cantilever and adapted to be movable relative to the substrate with the deflection of the micro-cantilever, and the mover and the micro- cantilever being formed of the same material.

More Like This:

WO/2013/123524	ACOUSTICALLY TRIGGERED NANO/MICRO-SCALE PROPULSION DEVICES
JP5108783	Micromachining sensor element
JP3230347	ANGLULAR VELOCITY SENSOR

Inventors:

YASUDA SUSUMU
HIROSE FUTOSHI
YAGI TAKAYUKI

Application Number:

JP2000019239A

Publication Date:

July 31, 2001

Filing Date:

January 27, 2000

Export Citation:

Click for automatic bibliography generation Help

Assignee:

CANON KK

International Classes:

B81B3/00; B81C1/00; C25D1/00; H01L41/083; H02K33/02; H02N1/00; H02N2/00; (IPC1-7): B81B3/00; B81C1/00; H01L41/083; H02K33/02; H02N1/00; H02N2/00

Attorney, Agent or Firm:

Tokuhiro Watanabe

Previous Patent: CONTINUOUS PAPER CUTTING DEVICE AND CUTTING MALFUNCTION DETECTING DEVICE AND METHOD

Next Patent: FINE STRUCTURE AND ITS MANUFACTURE