Title:
定量的ナノインデンテーション用マイクロ加工櫛形駆動機構
Document Type and Number:
Japanese Patent JP6397424
Kind Code:
B2
Abstract:
A system and method of measuring an interaction force is disclosed. One embodiment includes providing a method of measuring an interaction force including providing a microelectromechanical transducer. The transducer includes a body, a probe moveable relative to the body, and a micromachined comb drive. The micromachined comb drive includes a differential capacitive displacement sensor to provide a sensor output signal representative of an interaction force on the probe. The probe is moved relative to a sample surface. An interaction force is determined between the probe and the sample surface using the sensor output, as the probe is moved relative to the sample surface.
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Inventors:
Oh, Yunje
Major, ryan
Stofer, douglas
Said Azif, Said Amanura
Major, ryan
Stofer, douglas
Said Azif, Said Amanura
Application Number:
JP2015545445A
Publication Date:
September 26, 2018
Filing Date:
November 27, 2013
Export Citation:
Assignee:
HYSITRON INCORPORATED
International Classes:
G01Q60/24; G01N3/40; G01N19/04
Domestic Patent References:
| JP2009085729A | ||||
| JP6307850A | ||||
| JP2001041875A | ||||
| JP10508944A | ||||
| JP11515092A |
Foreign References:
| WO2011137451A1 | ||||
| WO2010003149A1 | ||||
| WO1999045361A1 |
Attorney, Agent or Firm:
Shinjiro Ono
Yasushi Kobayashi
Shigeo Takeuchi
Osamu Yamamoto
Shogo Nakamura
Yasushi Kobayashi
Shigeo Takeuchi
Osamu Yamamoto
Shogo Nakamura