MICRO PART PHYSICAL PROPERTY INFORMATION MEASURING APPARATUS

Title:

MICRO PART PHYSICAL PROPERTY INFORMATION MEASURING APPARATUS

Document Type and Number:

Japanese Patent JP3390544

Kind Code:

B2

Abstract:

PURPOSE: To measure physical property information such as an electron spin, a nuclear magnetic moment, a nuclear quadruple moment, etc., from an atomic scale micro part on a surface of a sample to be inspected with high sensitivity.
CONSTITUTION: A probe 2 of an interatomic power microscope is approached to a surface of a sample 1 to be inspected, a magnetic field is applied from a magnetic field generating coil 2 and magnetic paths 22-26, a high-frequency electromagnetic field is applied from coils 16, 17 to the sample 1 to be inspected, and a signal from atom existing on the surface of the sample 1 to be inspected to resonate with the electromagnetic field is detected by the probe 2.

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Inventors:

Shigeyuki Hosoki
Go Hasegawa
Makiko Kawano

Application Number:

JP23877394A

Publication Date:

March 24, 2003

Filing Date:

October 03, 1994

Export Citation:

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Assignee:

株式会社日立製作所

International Classes:

G01N24/00; G01N37/00; G01Q10/00; G01Q30/08; G01Q30/20; G01Q60/00; G01Q60/10; G01Q60/24; G01Q70/00; G01Q90/00; (IPC1-7): G01N13/16; G01N13/10; G01N13/12; G12B21/00

Domestic Patent References:

JP540100A
JP2287246A
JP419585A
JP7311251A
JP634732A

Other References:

【文献】欧州特許出願公開551814(EP,A1)

Attorney, Agent or Firm:

Yoshihiko Izumi

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