To reduce a cost, eliminate a waste disposal process having an influence on environment, and implement high-mix low-volume production, by using an organic material as raw material that is easily available and inexpensive, in a micro-pump and a manufacturing method thereof.
A main portion of a micro-pump 11 is constituted of a first to sixth organic materials 12 to 17 and a piezoelectric material 18. Fine shape processing for each organic material constituting a layer can be performed by using laser, the processed organic materials are laminated and joined to constitute a structure, and a piezoelectric element as a driving source is joined to the structure to implement the micro-pump, so that the structure can be manufactured without manufacturing a mold. Therefore, a material cost and a processing cost can be reduced, the waste disposal process after the processing is minimized, and high-mix low-volume production is implemented.
YAJIMA HIROYOSHI
YAMANAKA KEIICHIRO
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