Title:
マイクロ揺動体、光偏向器、画像形成装置
Document Type and Number:
Japanese Patent JP4027359
Kind Code:
B2
Abstract:
The present invention provides a resonance type micro-oscillating member capable of retraining a fluctuation of angular velocity, and specifically provides a micro-oscillating member, which is a nested micro-oscillating member, wherein there exist a reference oscillation mode which is the characteristic oscillation mode of a reference frequency, and an even numbered oscillation mode which is the characteristic oscillation mode of a frequency being approximate even number times the reference frequency.
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Inventors:
Susumu Yasuda
Yasuhiro Shimada
Yasuhiro Shimada
Application Number:
JP2004323758A
Publication Date:
December 26, 2007
Filing Date:
November 08, 2004
Export Citation:
Assignee:
Canon Inc
International Classes:
B81B3/00; G02B26/08; G02B26/10
Domestic Patent References:
| JP6175060A | ||||
| JP7027989A |
Attorney, Agent or Firm:
Keizo Nishiyama
Yuichi Uchio
Yuichi Uchio