Title:
マイクロバルブおよびマイクロポンプ
Document Type and Number:
Japanese Patent JP4005297
Kind Code:
B2
Inventors:
Jun Shinohara
Masayuki Suda
Kazuyoshi Furuta
Masayuki Suda
Kazuyoshi Furuta
Application Number:
JP2000134841A
Publication Date:
November 07, 2007
Filing Date:
May 08, 2000
Export Citation:
Assignee:
Seiko Instruments Inc.
International Classes:
B81B3/00; F16K31/02; F04B43/02; F04B43/04
Domestic Patent References:
| JP2149778A | ||||
| JP9502249A | ||||
| JP9007826A | ||||
| JP2000027813A | ||||
| JP4001418Y2 | ||||
| JP9229222A | ||||
| JP10038110A | ||||
| JP11257232A | ||||
| JP4066784A | ||||
| JP5001669A | ||||
| JP11257231A | ||||
| JP10299659A |
Foreign References:
| WO1999031420A1 | ||||
| US6000422 |
Attorney, Agent or Firm:
Yoshiharu Matsushita