Title:
MICROBRIDGE FLOW SENSOR
Document Type and Number:
Japanese Patent JPH02107923
Kind Code:
A
Abstract:
PURPOSE:To enable measurement of a flow velocity over a wide flow rate range by filling a plurality of slit-shaped openings formed with a high polymer resin to block the inflow of a gas into a through hole and the building up of a foreign matter. CONSTITUTION:A heater element 7 and resistance bulb elements 8 and 9 are formed at the center of a semiconductor substrate 1 and a plurality of slit- shaped openings 2a-2e and 3a-3e and 12a-12d are cut on both sides and at the center of the elements by an anisotropic etching. Then, a through hole 4 is formed communicating with the openings to form a bridge section 5 and a coating of a high polymer resin 13 such as polyimide is applied on the substrate 1 to close all of the openings while the through hole 4 is made hollow inside. This eliminates the inflow of a gas into the through hole 4, thereby enabling detection of a flow velocity of the gas only flowing over the surfaces of the elements 7, 8 and 9.
Inventors:
KUROSAWA TAKASHI
OSADA MITSUHIKO
YAMAMOTO TOMOSHIGE
OSADA MITSUHIKO
YAMAMOTO TOMOSHIGE
Application Number:
JP25956588A
Publication Date:
April 19, 1990
Filing Date:
October 17, 1988
Export Citation:
Assignee:
YAMATAKE HONEYWELL CO LTD
International Classes:
G01F1/68; G01F1/692; H01L35/00; (IPC1-7): G01F1/68; H01L35/00
Attorney, Agent or Firm:
Masaki Yamakawa (2 outside)
Previous Patent: JPH02107922
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