Title:
均一でない断面をもつマイクロキャビティを有するマイクロキャビティプラズマデバイス
Document Type and Number:
Japanese Patent JP5346946
Kind Code:
B2
Abstract:
An embodiment of the invention IS an array of microcavity plasma devices The array includes a first metal film electrode with a plurality of non-uniform cross-section microcavities therein that are encapsulated in oxide A second electrode is a thin metal foil encapsulated in oxide that is bonded to the first electrode A packaging layer contains gas or vapor in the non-uniform cross-section microcavities To make such device, photoresist is patterned to encapsulate the anodized foil or film except on a top surface at desired positions of microcavities A second anodization or electrochemical etching is conducted to form the non-uniform cross-section sidewall microcavities cavities After removing photoresist and metal oxide, a final anodization lines the walls of the microcavities with metal oxide and fully encapsulates the metal electrodes with metal oxide.
Inventors:
Eden, Jay Gary
Park, San Jin
Sue, Gwang
Price, Andrew Jay
Park, San Jin
Sue, Gwang
Price, Andrew Jay
Application Number:
JP2010531309A
Publication Date:
November 20, 2013
Filing Date:
October 27, 2008
Export Citation:
Assignee:
The Board of Trustees of the University of Illinois
International Classes:
H01J11/16; H01J9/02; H01J9/20; H01J11/18; H01J17/49; H01J65/00
Domestic Patent References:
| JP49029571A | ||||
| JP9120776A | ||||
| JP2008516380A | ||||
| JP2006073515A |
Foreign References:
| WO2007011865A1 | ||||
| WO2007087285A1 |
Attorney, Agent or Firm:
Kimura Mitsuru
Takanori Mamoru
Taiji Morikawa
Takanori Mamoru
Taiji Morikawa