Title:
MICROCHANNEL PLATE AND MANUFACTURING METHOD THEREOF
Document Type and Number:
Japanese Patent JP2022134384
Kind Code:
A
Abstract:
To provide a monolithic microchannel plate having a non-linear channel in which incident light impinges on the inner wall of the channel, and a manufacturing method of the microchannel plate.SOLUTION: A monolithic microchannel plate 10 made of single crystal silicon and having a first main surface 12a and a second main surface 12b facing each other includes a plurality of channels 12 passing between the first main surface 12a and the second main surface 12b, and the central axis of the channel 12 is non-linear.SELECTED DRAWING: Figure 1
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Inventors:
SAGAWA HIROSHI
Application Number:
JP2021033476A
Publication Date:
September 15, 2022
Filing Date:
March 03, 2021
Export Citation:
Assignee:
ROHM CO LTD
International Classes:
H01J43/24; H01J9/12
Attorney, Agent or Firm:
Hidekazu Miyoshi
Keishin Terayama
Keishin Terayama