Title:
MICROCHEMICAL ANALYTIC SYSTEM
Document Type and Number:
Japanese Patent JP3705745
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide an element technique of a new microplasma source or micronebulizer allowing a high sensitivity or microanalysis, and a microchemical analytic system equipped therewith on a chip.
SOLUTION: In this microchemical analytic system comprising a fine passage arranged on a substrate to constitute a flow type analytic system, a VHF-driven inductively coupled microplasma source part is arranged in the passage.
Inventors:
Takanori Ichiki
Application Number:
JP2001061005A
Publication Date:
October 12, 2005
Filing Date:
March 05, 2001
Export Citation:
Assignee:
Toyo University
International Classes:
G01N27/447; G01N21/05; G01N21/71; G01N37/00; (IPC1-7): G01N21/71; G01N21/05; G01N27/447; G01N37/00
Domestic Patent References:
| JP2001004628A | ||||
| JP2000002677A | ||||
| JP2002538461A | ||||
| JP2003520962A |
Foreign References:
| WO2000052455A1 | ||||
| WO2001053819A1 |
Attorney, Agent or Firm:
Toshio Nishizawa
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