Title:
MICROFABRICATION METHOD AND APPARATUS THEREOF
Document Type and Number:
Japanese Patent JP2005026462
Kind Code:
A
Abstract:
To solve a problem that introduction of the conventional nano inprint processing apparatus into mass-production and practical use is difficult.
In the microfabrication method for transferring an inverted concave and convex pattern of the original pattern to a substance to be processed by pressing the original pattern to the surface of the substance, conditions for process are set by pressing the original pattern to the predetermined member before process of the substance to be processed.
Inventors:
KITAOKA ATSUSHI
Application Number:
JP2003190393A
Publication Date:
January 27, 2005
Filing Date:
July 02, 2003
Export Citation:
Assignee:
CANON KK
International Classes:
B81C99/00; B82B3/00; H01L21/027; (IPC1-7): H01L21/027; B81C5/00; B82B3/00
Attorney, Agent or Firm:
Keizo Nishiyama
Yuichi Uchio
Yuichi Uchio