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Title:
Microscope device
Document Type and Number:
Japanese Patent JP5949024
Kind Code:
B2
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Inventors:
Motoo Koyama
Application Number:
JP2012066821A
Publication Date:
July 06, 2016
Filing Date:
March 23, 2012
Export Citation:
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Assignee:
NIKON CORPORATION
International Classes:
G02B21/00; G01N21/64
Domestic Patent References:
JP2002267934A
JP201096913A
JP2004177495A
JP2010249808A
Attorney, Agent or Firm:
Hoyo Joyo



 
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