Title:
微細構造の製造方法
Document Type and Number:
Japanese Patent JP3745648
Kind Code:
B2
Inventors:
Nobuo Sato
Katsuyuki Machida
Hitoshi Ishii
Kuraki 100 million
Katsuyuki Machida
Hitoshi Ishii
Kuraki 100 million
Application Number:
JP2001170853A
Publication Date:
February 15, 2006
Filing Date:
June 06, 2001
Export Citation:
Assignee:
Nippon Telegraph and Telephone Corporation
International Classes:
G01L1/14; G01L9/00; B05D1/40; B81B3/00; B81C1/00; G01L5/00; G01L9/12; H01L29/84
Domestic Patent References:
| JP2757259B2 | ||||
| JP6252420A |
Attorney, Agent or Firm:
Masaki Yamakawa