MICROWAVE ANTENNA AND MICROWAVE PLASMA PROCESSOR

Title:

MICROWAVE ANTENNA AND MICROWAVE PLASMA PROCESSOR

Document Type and Number:

Japanese Patent JP2001320227

Kind Code:

A

Abstract:

To provide a microwave antenna capable of suppressing the reflection of a microwave on a connecting part.

The microwave antenna is provided with an annular first tubular part 11a for propagating microwaves, one or plural introduction ports opened on the side face of the first tubular part 11a for introducing the microwaves into the first tubular part 11a, a second tubular part 16a connected to this introduction port for supplying the microwaves into the first tubular part 11a and plural openings 15a opened on the first tubular part 11a for taking the microwaves out of the first tubular part 11a. In the antenna, microwave matching equipment 30 capable of suppressing reflected waves generated on the connecting part of the first and second tubular parts 11a and 16a and inside the first tubular part 11a is provided in this connecting part.

Inventors:

MATSUMOTO NAOKI
HONDA MINORU
NAKANISHI TOSHIO
NAKAMURA TOSHIYUKI
HONDA SHIGEKI
FUKUMORI KOJI
YAMASHITA JUN

Application Number:

JP2000139078A

Publication Date:

November 16, 2001

Filing Date:

May 11, 2000

Export Citation:

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Assignee:

TOKYO ELECTRON LTD

International Classes:

H05H1/46; B01J19/08; H01L21/302; H01L21/3065; H01Q13/10; (IPC1-7): H01Q13/10; B01J19/08; H01L21/3065; H05H1/46

Attorney, Agent or Firm:

Tono Kono

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