Title:
MICROWAVE PLASMA GENERATING DEVICE
Document Type and Number:
Japanese Patent JP3080471
Kind Code:
B2
Abstract:
PURPOSE: To generate high-density plasma by improving transmission characteristics in a microwave plasma generating device using a bent vacuum waveguide tube.
CONSTITUTION: Second magnetic field generating coils 10a, 10b are provided for forming a magnetic force line 11 in an advance direction 12 of microwaves in a vacuum waveguide tube elbow 4, and a magnetic field of a larger strength than that of an electronic cyclotron resonance condition is formed in this vacuum waveguide tube elbow 4. The strength of this magnetic field is set to be the maximum close to a microwave introducing window 3, it is reduced monotonicly to an entrance of a plasma generating chamber 6, and it is smoothly connected to a magnetic field inside this plasma generating chamber 6. Disconnection of microwaves can be prevented when plasma is generated in the waveguide tube elbow 4, and reflection of microwaves is reduced to improve a microwave power introducing efficiency into the plasma generating chamber 6, thereby high-density plasma can be generated.
Inventors:
Hisashi Iga
Yasunori Ohno
Kenichi Natsui
Yasunori Ohno
Kenichi Natsui
Application Number:
JP6500592A
Publication Date:
August 28, 2000
Filing Date:
March 23, 1992
Export Citation:
Assignee:
株式会社日立製作所
International Classes:
G01R33/64; C23C16/50; C23F4/00; G01N24/14; H01L21/302; H01L21/3065; H05H1/46; (IPC1-7): H05H1/46; C23C16/50; C23F4/00; H01L21/3065
Attorney, Agent or Firm:
Kiyoshi Maruyama (6 others)