To provide a microwave plasma generator capable of generating a long-line-shaped plasma.
The microwave plasma generator comprises: a waveguide 1, a microwave generation source 3, microwave supply conductors 9, 10 for feeding a microwave from the microwave generation source to the waveguide, a gas supply source 5, and gas supply tubes 4 for feeding gas to the waveguide from the gas supply source. The waveguide is composed of a flat-rectangular-shape waveguide being formed in such a way that the width is larger than the thickness in the cross section perpendicular to the longitudinal axis, and the width (a) of the waveguide is selected for a wavelength of a microwave λ0 in vacuum and λg at the inside of the waveguide so as to satisfy the relational expression, λg=λ0/[1-(λ0/2a)2]1/2, and the microwave wavelength λg at the inside of the waveguide is chosen to be longer than a length of plasma to be produced. Furthermore, plasma producing means 2, 4 for converting an electromagnetic field produced at the inside of the waveguide to energy for gas ionization are comprised.
| JP2023152365 | PLASMA PROCESSING APPARATUS |
| JP2862088 | [Title of Invention] Plasma Generator |
| JP2002068864 | PLASMA RESISTANT MEMBER AND METHOD OF MANUFACTURING FOR THE SAME |
FUKAZAWA TAKAYUKI
FUJII SHUITSU
Noriko Murata
Shuji Tokuoka
Hiromitsu Shigemoto
Naoko Oozumi