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Title:
MICROWAVE SUPPLY SYSTEM
Document Type and Number:
Japanese Patent JP2005340964
Kind Code:
A
Abstract:

To provide a microwave supply system wherein a transmission means with an excellent transmission characteristic and almost without causing deterioration or the like to a microwave supplies the stable microwave to a movable microwave processing section which efficiently therein generating plasma.

A microwave transmission section A for transmitting a microwave from a microwave generator 20 to the microwave processing section 10 is provided with a pad flange 30 and a choke flange 40. The radius of the choke flange 40 or the like is defined by a formula of (radius of flange [mm]) ≥{(length of short side of rectangular waveguide [mm])/2}+{(guide wavelength [mm])/4}+12 [mm] and a width of a microwave seal face of the choke flnage 40 (outward opposite face 47) is selected to be 12 [mm] or over.


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Inventors:
KURASHIMA HIDEO
KOBAYASHI AKIRA
ONOZAWA YASUTETSU
Application Number:
JP2004153798A
Publication Date:
December 08, 2005
Filing Date:
May 24, 2004
Export Citation:
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Assignee:
TOYO SEIKAN KAISHA LTD
International Classes:
H05H1/46; C23C16/511; H01P1/04; H01P1/209; H01P3/12; H01P5/02; (IPC1-7): H01P1/04; C23C16/511; H01P1/209; H01P3/12; H01P5/02; H05H1/46
Domestic Patent References:
JPS58149801U1983-10-07
JP2001156501A2001-06-08
JP2002374101A2002-12-26
JPH08106994A1996-04-23
JPS5746501A1982-03-17
Attorney, Agent or Firm:
Kihei Watanabe



 
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