To provide a mini-environment having a compact and energy saving dehumidifier.
In the mini-environment, a mini-environment body internally having a transfer chamber for transferring a wafer, and a dehumidifier installed between the exhaust side and the suction side of the mini-environment body and dehumidifying the interior of the mini-environment body are provided. The dehumidifier consists of a suction dehumidifier including a pre-cooler 27 and an after-cooler 28 for cooling the air supplied to a dehumidification material adsorbing moisture, and an exhaust heater 33 and a regeneration heater 23 for heating the air supplied to a dehumidification material adsorbing moisture. A peltier element 41 is used as the heat source of the precooler 27 and after-cooler 28, and the exhaust heater 33 and regeneration heater 23.