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Patent Searching and Data


Title:
MINI-ENVIRONMENT TRANSPORT DEVICE
Document Type and Number:
Japanese Patent JP2013115065
Kind Code:
A
Abstract:

To provide a mini-environment having a compact and energy saving dehumidifier.

In the mini-environment, a mini-environment body internally having a transfer chamber for transferring a wafer, and a dehumidifier installed between the exhaust side and the suction side of the mini-environment body and dehumidifying the interior of the mini-environment body are provided. The dehumidifier consists of a suction dehumidifier including a pre-cooler 27 and an after-cooler 28 for cooling the air supplied to a dehumidification material adsorbing moisture, and an exhaust heater 33 and a regeneration heater 23 for heating the air supplied to a dehumidification material adsorbing moisture. A peltier element 41 is used as the heat source of the precooler 27 and after-cooler 28, and the exhaust heater 33 and regeneration heater 23.


Inventors:
TAGUCHI TOMOHIRO
Application Number:
JP2011256896A
Publication Date:
June 10, 2013
Filing Date:
November 25, 2011
Export Citation:
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Assignee:
HITACHI HIGH TECH CONTROL SYS
International Classes:
H01L21/677; B01D53/26; F24F3/14; H01L21/02
Attorney, Agent or Firm:
Yamato Tsutsui