Title:
MINIATURE ACTUATOR FOR POSITIONING PROBE
Document Type and Number:
Japanese Patent JP3163003
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To obtain an improved actuator/probe assembly for testing the electric circuit on a semiconductor chip.
SOLUTION: The inexpensive and lightweight miniature actuator 50 for positioning a probe realizes compact packaging having relatively long stroke at high acceleration. The actuator 50 comprises a pair of substantially parallel cantilever beams 56, 57 each comprising a flexible signal propagation cable made of polyimide wherein the forward end of probe is suspended from the armature 58 of actuator and forms a part thereof. The armature 58 comprises a pair of coils 60, 61 wound reversely around the intermediate part of the beam. The coils 60, 61 cooperate electromagnetically with a pair of magnets disposed fixedly to (coil/armature) while spaced apart from each other in order to constitute a motor 55 and shifts the armature 58, and thereby, the forward end of a probe 70. Light weight of the coils 60, 61 and the armature 58 is combined with double functions of suspension beam to realize a highly accurate, high sensitivity probe actuator and highly reliable operation.
Inventors:
Jean-Chan Lo
Mitchell Salvezio
James Michael Hammond
Mitchell Salvezio
James Michael Hammond
Application Number:
JP11154496A
Publication Date:
May 08, 2001
Filing Date:
May 02, 1996
Export Citation:
Assignee:
International Business Machines Corporation
International Classes:
G01R1/06; G01R1/067; G01R31/28; G05D3/00; G01L1/00; H01L21/66; (IPC1-7): G01R31/28; G01L1/00; G05D3/00; H01L21/66
Domestic Patent References:
| JP4310878A | ||||
| JP42969A | ||||
| JP6150048A | ||||
| JP662376U |
Attorney, Agent or Firm:
Hiroshi Sakaguchi (1 person outside)
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