To facilitate cutting of a minute cutting tool into a workpiece and to prevent a damage of the minute cutting tool, by cutting and removing a passive film formed on the surface of a cutting object part by a cutting tool, and by moving an electrode in the direction of cutting progression with the progression of cutting of the workpiece.
An electrolytic voltage is applied between an electrode 5 and a workpiece 4. Hereby, a passive film 40 having a small resistance force against a cutting tool 8 is formed on the whole surface contacted with electrolyte solution 2 of the workpiece 4. A main control part 15, receiving an electrolytic- voltage application finish signal, starts rotation of the minute cutting tool 8, and lowers the minute cutting tool 8 by a Z-axis stage 10 from the upper face 4b of the workpiece 4 to a position (cutting start position) in the vertical downward direction as much as the cutting depth H, and moves the workpiece 4 in the cutting direction by an X-axis stage 11 and a Y-axis stage 12 and then executes the cutting of the workpiece 4.
WAKABAYASHI KIMIHIRO
YAMADA MAKI
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