Title:
MINUTE MECHANISM PART AND PRODUCTION THEREOF
Document Type and Number:
Japanese Patent JP3448987
Kind Code:
B2
Abstract:
PURPOSE: To obtain a minute mechanism part capable of being simply formed with high accuracy and having a three-dimensional fine complicated shape having a dimension of several mm or less and requiring accuracy of μm order.
CONSTITUTION: A process forming a photosensitive resin film 1 on a base material to expose the same to a desired pattern and a process forming an intermediate film 2 preventing the mixing of the resin film and prohibiting the exposure of the resin film are repeated to form a multilayered structure consisting of the resin films and the intermediate films 2 and the multilayered structure is immersed in a resin developing soln. to selectively remove the exposed parts to obtain a minute mechanism part having a three-dimensional shape.
Inventors:
Takuji Oda
Minoru Kobayashi
Sai Ohta
Minoru Kobayashi
Sai Ohta
Application Number:
JP26700394A
Publication Date:
September 22, 2003
Filing Date:
October 31, 1994
Export Citation:
Assignee:
Mitsubishi Electric Corporation
International Classes:
B29C35/08; B29C67/00; B81C1/00; B29K105/24; (IPC1-7): B81C1/00; B29C35/08; B29C67/00
Domestic Patent References:
| JP2108519A | ||||
| JP6232009A | ||||
| JP594937A | ||||
| JP6212477A |
Attorney, Agent or Firm:
Kaneo Miyata (1 person outside)