Title:
MINUTE SHAPE MEASURING APPARATUS
Document Type and Number:
Japanese Patent JPH03261808
Kind Code:
A
Abstract:
PURPOSE:To correct a part which is impossible to be measured by detecting the generation of discontinuity of a measuring laser beam by an attached optical system. CONSTITUTION:A measuring sample 1 is positioned by an X-Y stage 2. A focus of an objective lens 3 is met on the measuring sample 1. The objective lens 3 is illuminated by a laser source 5 and a while light source 4 through a half mirror 6. A monitoring light returning from the objective lens 3 is divided in half by a beam splitter 8, one forming an image at an optoelectric transducer 14 through an image forming lens 13, and the other being guided to an astigmatism optical system comprised of a band-pass filter 9, a cylindrical lens 10, a lens 11, and a four-dividing sensor 12. A signal from each sensor cell of the sensor 12 is converted to the height data by a height data converter 17, while an image of the optoelectric transducer 14 is changed to a binary-coded image by a binary-coding circuit 15. The continuity of the laser beam is judged by a continuity detector 16, based on the result of which the data of the height data converter 17 is corrected by a correcting circuit 18.
Inventors:
KINOSHITA TAKESHI
Application Number:
JP6136190A
Publication Date:
November 21, 1991
Filing Date:
March 12, 1990
Export Citation:
Assignee:
NEC CORP
International Classes:
G01B11/24; G01B11/245; (IPC1-7): G01B11/24
Attorney, Agent or Firm:
Uchihara Shin
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