Title:
MINUTE SURFACE SHAPE MEASURING MICROSCOPE
Document Type and Number:
Japanese Patent JPS6456408
Kind Code:
A
Abstract:
PURPOSE:To specify a shape of a stereoscopic image of a minute surface shape and its measuring position, by providing an observation optical system containing a visual field observing means so that a surface shape of a measuring object can be enlarged and observed, providing a height measuring optical system so that its objective lens can be used in common, and processing the obtained height information. CONSTITUTION:By processing the height information which has been obtained by a height measuring optical system 19, a stereoscopic image of a minute surface to be measured can be obtained. Also, an objective lens of an observation optical system 18 which can enlarge and observe a surface shape of a measuring object on an XY stage 35, and an objective lens 83 of the height measuring optical system 19 are used in common, therefore, the constitution of the optical system is simplified, and also, a switching operation of both the optical systems is not required, and moreover, an index is provided on a visual field observing means of the observation optical system 18. In such a way, a measuring range by the height measuring optical system 19 against the measuring object 17 can be known easily.
Inventors:
SATO EIICHI
KOSHIISHI KIYOZO
SHIGETOMI SADAO
TANAKA SHUNPEI
YOSHINAGA MAKOTO
MORITA AKIMASA
NAGANO CHIKARA
KOBAYASHI SHIYOUHEI
SATO CHIAKI
TODA AKITOSHI
KUBO MASANORI
TOUFUKUJI IKUO
KOSHIISHI KIYOZO
SHIGETOMI SADAO
TANAKA SHUNPEI
YOSHINAGA MAKOTO
MORITA AKIMASA
NAGANO CHIKARA
KOBAYASHI SHIYOUHEI
SATO CHIAKI
TODA AKITOSHI
KUBO MASANORI
TOUFUKUJI IKUO
Application Number:
JP21356287A
Publication Date:
March 03, 1989
Filing Date:
August 27, 1987
Export Citation:
Assignee:
OLYMPUS OPTICAL CO
International Classes:
G02B21/36; G02B21/00; (IPC1-7): G02B21/00; G02B21/36
Attorney, Agent or Firm:
Atsushi Tsuboi